Used TEL / TOKYO ELECTRON TE 8500 PATC #293642894 for sale

TEL / TOKYO ELECTRON TE 8500 PATC is an etcher/asher designed to remove materials from a substrate, such as semiconductor wafers or flat panel displays, using plasma etching, reactive ion etching, or physical sputtering with argon, oxygen, nitrogen, or other plasma gases. It is designed for high throughput with its capability to process up to four 300mm diameter substrates simultaneously. TEL TE 8500 PATC offers a wide range of features and capabilities, which include precision etching and ashing, process control and automation, simplified recipe and data management, and low-temperature processing. The equipment incorporates a high-end source, plasma generator, and RF power source to ensure high performance, reproducible, and reliable etching results. The system also provides a high vacuum environment with a low base pressure of 10 mTorr and a fast pumping cycle with a processing pressure in the range between 5 mTorr and 250 mTorr. The high-resolution optical imaging unit with ion beam imaging sensor (IBIS) is designed to provide continuous feedback on the etching process to ensure uniform etching. Furthermore, it offers a high degree of automation with automated wafer/substrate loading and unloading, as well as ETCH Index Control (EIC), which allows the machine to be operated in parallel with other etching systems, while providing access and control of all parameters. TOKYO ELECTRON TE 8500 PATC has a small footprint and is designed to be easily integrated into a factory. The tool offers efficient energy consumption with its built-in exhaust asset, which prevents backflow, and is compliant with safety regulations in different countries. It also provides a user-friendly interface, as well as an easy-to-follow operation guide, to enable users to quickly set up and use the model. Moreover, the equipment provides a wide range of recipes, which can be customized and saved, allowing users to effortlessly repeat a process and minimize setup time. In summary, TE 8500 PATC is a high performance, cost effective, and easy to use etcher/asher designed for wafer/substrate processing. Its automated process control, low-temperature capability, and easy integration make it an ideal system for a wide range of etching and ashing applications.