Used TEL / TOKYO ELECTRON TE 8500(S)ATC #9148198 for sale

TEL TE 8500(S)ATC is a highly advanced etcher/asher used in semiconductor manufacturing. It is a next-generation, high-throughput, high-performance etcher/asher designed to handle processes for a wide range of applications. The equipment utilizes a combination of the Neutral Particle Semiconductor Processing Module (NPS) and a high-electron Multi-Trap (MET) sub-system to achieve low etch rates, uniformity, and superior quality of etched features. The NPS unit consists of a rotating Optical Emission Cell (OEC) and a Mass Analyzer, which capture and analyze particles in the process gases for etching or ashing. This machine is capable of working with different gases, allowing for precise control and regulation of the etching and ashing process. TOKYO ELECTRON TE 8500(S)ATC also includes a magnetic field-based etch-stop mechanism with a high-rate accuracy, which enables the tool to operate deterministically and in reliable manner. The process chamber can work efficiently with low reactivity processing gases, allowing for better control of etch rate and uniformity. The asset also supports very large substrates, making it ideal for large-scale production processes. TEL / TOKYO ELECTRON TE 8500(S)ATC also supports a wide range of substrate temperatures, from vacuum to high temperatures, making it suitable for a variety of processes. The model is equipped with a variety of bells and whistles, including a user-friendly GUI, pre-programmed state-of-the-art tool sequences, error handling, advanced recipe management, and software debugging capabilities. It is also equipped with a powerful control platform featuring a large, digitized display panel and a customizable process database designed to meet customer-specific requirements and processes. Furthermore, TEL TE 8500(S)ATC is designed with performance reliability and serviceability in mind, and comes with a range of options, such as multiple chambers, programmable gas and chamber temperatures, and offline recipe management. TOKYO ELECTRON TE 8500(S)ATC is a robust and advanced etcher/asher designed for the semiconductor manufacturing industry. It features a modular design, and its high-throughput and enhanced feature uniformity allow for more efficient production process cycles. Highly reliable and customizable, the equipment is well suited for a variety of applications and is a great choice for semiconductor companies looking to increase their production capabilities.