Used TEL / TOKYO ELECTRON TE 8500(S)ATC #9148200 for sale

TEL TE 8500(S)ATC is an advanced etching equipment designed for the production of Microelectromechanical Systems (MEMS) and other small, sensitive components. It is the industry standard in plasma etching chambers and is renowned for its precision and throughput. TOKYO ELECTRON TE 8500(S)ATC is a multi-chamber system, with a process chamber that incorporates up to four sub-chambers. It contains a number of advanced features that allow it to achieve tight process control and repeatability, while minimizing component damage. TEL / TOKYO ELECTRON TE 8500(S)ATC includes a Gas-Distribution Unit with a vacuum-tight gas box which ensures gas stability by backfilling and blending gases within the machine as well as gas supply from outside. This helps ensure repeatable film properties and etch rates. The etching process usually works by applying an electric field to create plasma and directing the plasma onto the component surface. TEL TE 8500(S)ATC also contains an upper chuck with sensors which allow for precise temperature and pressure control, providing reliable and repeatable etching results. The upper chuck is designed to ensure uniform temperature across the component and flatness is maintained over time to a tolerance of 1-3 microns for the substrate and 4-10 microns for double-sided wafers. A wafer-level cleaning tool within the upper chuck also helps to minimize particle build-up, as well as feature-selective materials. In addition, TOKYO ELECTRON TE 8500(S)ATC has a self-aligning loader that allows for efficient wafer transfer between the chamber and the loadlock. This prevents injury or contamination to the substrates. For added safety, the asset is equipped with numerous built-in safety functions that can automatically shut down the process when necessary. TEL / TOKYO ELECTRON TE 8500(S)ATC is a state-of-the-art etcher/asher designed to meet the most demanding requirements of semiconductor manufacturers. The chamber is able to deliver precise, repeatable etching results with minimal component damage. The model also ensures production efficiency and safety for the user. The combination of advanced features and safety features make TEL TE 8500(S)ATC an ideal choice for high-volume production.