Used TEL / TOKYO ELECTRON TE 8500(S)ATC #9293867 for sale

TEL TE 8500(S) ATC etcher is a microfabrication equipment used for pattern transfer and pattern definition. The TE 8500 series is a state-of-the-art instrument designed for a variety of semiconductor technology applications. The system operates at ultra-low temperatures and fine feature cutting capabilities, resulting in a low cost of ownership. Its oxidation and planarizing capabilities enable customers to more accurately and reliably define microscale and nanoscale features. The TE 8500 etcher features an advanced automatic tuning controller (ATC) that automatically optimizes the parameters for etching and material removal. It also offers a range of operating modes, such as the chemical modulated process, which can be used to refine surface roughness. The TE 8500 control software is designed with a graphic user interface and integrated diagnostics to simplify the tuning and operation of the unit. The machine generates time and energy histories for both the etched and planarized wafer surface. The TE 8500 precision load locks provide a clean, non-contaminated environment for the wafers being processed and offer a smooth transfer between the wafer edge and the wafer processing chamber. A unique safety feature of the TE 8500 etcher is its built-in ion source cleaning capabilities. This helps ensure that the etching chemicals and deposition lines are safe and free from particle contamination for a better, more reliable etching process. The TE 8500 is available in 1.2M, 2M and 3M platforms. All platforms feature integrated Cognex vision systems for automatic wafer detection and alignment. The 2M and 3M platforms also feature the ability to measure critical dimensions. Overall, the TE 8500(S) ATC etcher is an ideal choice for microfabrication and semiconductor technology. Its compact size, low cost of ownership and advanced features make it an excellent choice for customers looking to optimize their production processes.