Used TEL / TOKYO ELECTRON TE 8500 #293608639 for sale

TEL / TOKYO ELECTRON TE 8500 is an advanced etcher/asher for industrial applications. It is a high-end Open-Loop Equipment (OLS) that offers superior etching performance and is used to create multi-level mesas, gate structures, capacitors, and other critical components. As an OLS, it autonomously maintains stable etching conditions with its sophisticated process control featuring real-time etching monitoring and automatic process optimization. TEL TE 8500 utilizes a pneumatically actuated active shutter system to isolate the source plasma and operating environment. It effectively minimizes cross-contamination and enables higher etching selectivity and repeatability. Its advanced high-frequency (HF) source plasma generator offers superior controllability and flexibility, which allows for fine-tuned adjustments and uniform etching of small features and/or MEMS components. TOKYO ELECTRON TE 8500 also offers scalable process chambers with multi-gas introduction, enabling plasma etching with SF₆ , CF₄, Ar, O₂, CO₂, He, CHF₃, NF₃, R₂ and other gases for a wide variety of applications. It operates using an automatic recipe control unit, enabling repeatable, reliable, and safe etching without user intervention, as well as a real-time editing machine that allows for changes to be made on the fly. In terms of safety, TE 8500 complies with relevant international standards and boasts built-in protection mechanisms, such as a high vacuum cutoff, thermal shutdown, and over-current protection. It also features a range of accessories and an optional loader/unloader tool, granting greater convenience and user care. TEL / TOKYO ELECTRON TE 8500 is an ideal choice for precision etching of fine patterns and MEMS components in a wide range of industries, offering greater accuracy, repeatability, and flexibility than other etchers and ashers on the market today.