Used TEL / TOKYO ELECTRON TE 8500 #293758442 for sale

TEL / TOKYO ELECTRON TE 8500 from TEL is a state-of-the-art etcher / asher tool. It is a highly automated equipment designed to produce a wide range of processes with high precision, even on wafer surfaces. This makes it perfect for advanced photonics and MEMS manufacturing. TEL TE 8500 utilizes a fully integrated environment for process development four enhanced substrate adhering and, as a consequence, improved overlay repeatability and multi-step processing. This etcher / asher also incorporates an advanced load lock system with the capability of handling a variety of wafer sizes, from standard to large-scale applications. TOKYO ELECTRON TE 8500 incorporates technologies such as Stealth-Technology, which provides a low profile robot and minimized error rates for substrate loading. It also integrates High Low Temperature Wafer Transfer and ultra-precise temperature control for reliable etching. The tool is capable for managing highly-precise pulse etch times to up to ten µS precision. The tool offers a continuous etch improvement cycle based on density feedback control. TE 8500 offers ultra-accurate continuous chamber clean performance, is equipped with an inertial module, and also provides scrubber and degas features. It has three-dimensional ability to identify wafer maps for a variety of applications and a redundant wafer position detection and handling unit. TEL / TOKYO ELECTRON TE 8500 provides excellent repeatability and stability with the use of a proprietary gas abstraction machine and a series of user interface which allow recipe editing and execution. Equipped with specific hardware for integration and ion beam technology, TEL TE 8500 also provides a wide process window and high precision resolution at the nanometer level. This specialized etcher / asher tool is an excellent choice for producing a wide range of complex processes associated with semiconductor manufacturing. It is highly accurate, providing repeatability and stability for a variety of manufacturing applications and is capable of handling standard and large-scale projects. TOKYO ELECTRON TE 8500's use of high precision automation technologies make it an excellent choice for the most demanding applications.