Used TEL / TOKYO ELECTRON TE 8500 #293811575 for sale

TEL / TOKYO ELECTRON TE 8500
ID: 293811575
Wafer Size: 6"
Etcher, 6".
TEL / TOKYO ELECTRON TE 8500 is a high-precision, full-featured etcher/ asher designed to etch and ash substrate materials quickly and accurately. This machine possesses an impressive array of features, including integrated electrostatic chuck support, advanced process control capabilities, high-accuracy plasma source, and robust etching/ashing processes. TEL TE 8500 electrostatic chuck (ESC) provides precise, adjustable, precise vacuum hold to secure the substrate during processing. Esc is also mmHg-air-proof to ensure substrate cleanliness, and that the ESC's compatibility with the substrate materials is precisely set up. Furthermore, the ESC can be covered by a lid to maintain cleanliness and reduce any interference from air and emissions. The advanced process control capabilities of TOKYO ELECTRON TE 8500 enable the machine to precisely regulate etch and ash settings for optimized performance across all types of material. Through the use of advanced software-based control systems and parameters, this etcher/ asher can easily and quickly adjust settings for optimum etch/ash results. The included process control system also monitors and records all processes, providing the operator quick access to data at the moment of need. TE 8500 also includes a high-accuracy plasma source to achieve precise etch and ash settings and results. Used in combination with the integrated magnetic coil, the plasma source allows for very precise control over the ionization of the plasma and how it is used to achieve etch and ash settings. Moreover, a limiting shutoff protects against accidental reactivity while preserving the plasma field shape. Finally, TEL / TOKYO ELECTRON TE 8500 offers robust etching/ ashing processes that feature efficient, high precision results. The built-in electrical control systems deliver repeatable performance for both etch and ash operations, and the superior uniformity of the plasma field helps ensure etch/ash accuracy. TEL TE 8500 also features special etching/ashing procedures for many types of hard-to-etch and hard-to-ash materials. In summary, TOKYO ELECTRON TE 8500 is an advanced, full-featured etcher/asher that provides precise and efficient etching/ashing capabilities. With integrated electrostatic chuck support, advanced process control capabilities, high-accuracy plasma source and robust etching/ ashing processes, this machine is an ideal choice for achieving superior etch and ash results.
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