Used TEL / TOKYO ELECTRON TE 8500 #9059245 for sale

TEL / TOKYO ELECTRON TE 8500 is an advanced etcher / asher equipment designed for large-scale semiconductor manufacturing processes. It is capable of etching or ashing samples on both wafer and individual die sizes with high throughput and accuracy. The system integrates an advanced substrate holder design along with a highly efficient chamber heating unit, allowing for precise temperature control throughout the etching process. The machine supports a wide range of etchant chemistries as well as specially designed plasmas for improved surface activation and cleaning. TEL TE 8500 comes with a high-resolution, laser interferometry-based wafer-profiling tool, allowing for patterning control on the nanometer scale. Its main chamber allows for excellent etching uniformity on up to 200 mm wafers, with minimum wafer flatness and particle defects. The tool's automated supply of wafers, along with a clean descum setup and advanced exhaust systems, prevents contamination of the etch products. TOKYO ELECTRON TE 8500 also offers precise monitoring of the etching process, with integrated process control features such as time-of-flight mass spectrometry and ion flux gauges. It is a truly versatile etching asset, providing support for both prototype and production manufacturing.