Used TEL / TOKYO ELECTRON TE 8500 #9068919 for sale

TEL / TOKYO ELECTRON TE 8500
ID: 9068919
Etchers, 6".
TEL / TOKYO ELECTRON TE 8500 is an etcher/asher that is designed for high precision material removal. It is used to remove thin films from substrates, including metals, oxides, nitrides, and III-V materials, with a high degree of precision and accuracy. This is achieved through its ultra-precise machining capability, with a process control based on a closed-loop equipment that understands the motion of the wafer stage and the etching components. TEL TE 8500 also has the capability to process a variety of materials, with a wide range of etch recipes for each material type. It is also equipped with an air shower for reducing contamination levels from outside the system. TOKYO ELECTRON TE 8500 includes fully automated supply, load, and unload capabilities. With this highly advanced function, the unit will optimize loading and unloading without the need for operator involvement. This etcher/asher is constructed with a dual source mass-flow controller, which can control the etch process for both fine and coarse control. This provides superior accuracy and long-term stability with minimal maintenance. The machine also includes an advanced recipe manager which aids in recipe control and data management. In addition, TE 8500 offers a flexible vacuum tool with an advanced interlock network and nozzle vacuum asset. This allows for adjustment of the pressure and flow rate, depending on the etch process that is being used. The interlock network is designed with a safety model that will shut down the machine when any unforeseen event happens. TEL / TOKYO ELECTRON TE 8500 is a highly accurate and efficient etcher/asher, with many features that enable the equipment to handle a multitude of etching processes. This system is equipped with all the necessary safety systems and has advanced automation capabilities that make it ideal for production applications. This unit is durable and reliable, making it the perfect choice for precision etching processes.
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