Used TEL / TOKYO ELECTRON TE 8500 #9195649 for sale

TEL / TOKYO ELECTRON TE 8500 is a fully automated, high throughput etching / asher equipment designed for the most demanding applications. Offering precision process control and fast responses, the etcher / asher meets the strict needs of the most demanding customers. TEL TE 8500 is constructed of a chamber body having three temperature zones, an isolation valve, an exhaust port, and a three-level thermal filter for safety and environmental compliance. The chamber is machined from stainless steel and features a large frontal opening, allowing for maximum throughput of samples. A duplex pump provides process sensitivity while controlling chlorine and fluorine ions. The chamber is equipped with an electrostatic chuck and is capable of handling a wide range of substrates. TOKYO ELECTRON TE 8500 features a touchscreen interface allowing for programmable recipes and data storage. The system supports repeatable etching operations with highest efficiency and accuracy. There are several standard modes of operation, including manual, Expert-Etch, and Multi-Etch, each offering different levels of control. For example, the Multi-Etch mode can provide independent control of etch parameters, which can be programmed with variations of etch time, temperature, and gas composition. TE 8500 is equipped with a variety of optional accessories, such as an upper and lower temperature sensor, ozone scrubber, ionic clean chamber, and remote monitoring unit. Additionally, the etch chamber features a dual pane view port which allows for observation of the inside of the etching or ashing process. This view port also supports online and offline analysis of wavelength dispersive x-ray spectra. TEL / TOKYO ELECTRON TE 8500 etcher / asher is designed to provide reliable, reproducible results in a variety of applications, including production of thin film thinners and coatings, wafer and semiconductor manufacturing, and lithography. The machine offers precise control of the etching and ashing parameters, allowing for repeatable results with little or no maintenance.