Used TEL / TOKYO ELECTRON TE 8500P #293608635 for sale

TEL / TOKYO ELECTRON TE 8500P
ID: 293608635
Vintage: 1996
Oxide etcher 1996 vintage.
TEL / TOKYO ELECTRON TE 8500P is a high-precision etcher/asher designed for a range of microfabrication processes. It offers an excellent combination of accuracy, repeatability, and reliability. TEL TE 8500 P features four independent axes of motion. The X and Y axes both have a resolution of 5 microns, allowing for precise placement of substrate surfaces. The X axis also features a brief movement capability for quickly transferring substrates from one place to another. The Z axis offers a range of 0.1mm - 17.5mm. The W axis has a range of ±45°, allowing for precise manipulation of substrate positioning. TOKYO ELECTRON TE-8500 P also offers a variety of process control options, such as oxygen flow and gas flow. This enables users to customize their etching and ashing processes to their specific requirements. An independent ion source eliminates the need for repeated manual adjustments throughout the process, ensuring accurate and consistent etching/ashing results. To ensure easy operation and maintenance, TEL TE 8500P includes a touchscreen monitor and optional PC operations. The monitor features a simple graphical user interface to easily monitor and operate the system. The PC operations allow users to store and recall recipes, streamline processes for repeatability, and run statistical process control measurements. TEL TE-8500 P also offers exceptional safety standards, featuring an emergency stop button, auto-adjustment for etching/ashing pressure, and over-voltage protection for all motor drives. The silent and vibration-free operation also allows for maximum comfort for users. Overall, TEL / TOKYO ELECTRON TE-8500 P is a versatile and reliable etcher/asher designed to accommodate a wide range of microfabrication processes. Its four independent axes of motion, a variety of process control options, and intuitive touchscreen monitor ensure accuracy, repeatability, and reliability. Additionally, its safety features combined with silent operation make it a safe and comfortable choice for any application.
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