Used TEL / TOKYO ELECTRON TE 8500P #293608637 for sale

TEL / TOKYO ELECTRON TE 8500P
ID: 293608637
Vintage: 1996
Oxide etcher 1996 vintage.
TEL / TOKYO ELECTRON TE 8500P is an ultra-high resolution etcher / asher designed for use in the semiconductor industry. It is a highly versatile piece of equipment that can be used to process a variety of applications such as photomasks, integrated circuit (IC) lithography, and thin film deposition. TEL TE 8500 P features a large chamber size that enables the simultaneous processing of multiple substrates with a high degree of uniformity, while providing a high-performance solution for device layers and other features. Its digital control system ensures precise alignment and accuracy of patterning while the advanced deposition techniques enable the use of a wide range of chemicals. TOKYO ELECTRON TE-8500 P has an advanced vacuum system that provides high deposition accuracy and repeatability as well as excellent uniformity. The Dry Etch Rate (EDR) and Uniformity (UN) measurable parameters of the etcher are controlled to achieve ultra-high resolution with minimal dielectric damage. The etcher's controller provides intuitive software for easy setup and operation, allowing fine-tuning with a range of parameters for specific applications. Furthermore, TE 8500P includes an advanced and sophisticated pattern recognition system that enables accurate alignment of the substrate and pattern in both azimuthal and radial directions. The etcher's large chamber size also enables the simultaneous deposition and patterning of multiple layers of metal, insulator or semiconductor. This reduces processing time and ensures that the same film thickness, grain orientations and device characteristics are consistent across all layers. In addition, TE-8500 P can be used with a variety of gases including Fluorinated Carriers (FACs), and is capable of achieving high-accuracy deposition in combination with a low etching rate and uniformity. The etcher is also capable of providing high-speed processes with enhanced productivity, and is capable of handling upto 1 million pattern features per hour, ensuring optimal product yields and low cost. Overall, TEL / TOKYO ELECTRON TE 8500 P is a highly advanced etcher / asher that offers unparalleled precision, accuracy, and positioning control. It provides a versatile platform for various semiconductor and device fabrication processes, making it an indispensable tool for a wide range of research and commercial applications.
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