Used TEL / TOKYO ELECTRON TE 8500P #293766868 for sale

ID: 293766868
Vintage: 1992
Dry etcher 1992 vintage.
TEL / TOKYO ELECTRON TE 8500P is an automated etcher/aser for semiconductor device fabrication. This equipment is equipped with advanced features such as an automatic coating chamber, a refrigerant cover, a programmable abrasive detector, and a load lock arm system. TEL TE 8500 P utilizes an advanced air-bearing platform to provide precise motion control and stability over the pad level of semiconductor devices. This allows for precise, repeatable results with short cycle times and improved process uniformity. TOKYO ELECTRON TE-8500 P features a three-stage process in its etching cycle, enabling up to eight different materials to be etched simultaneously. The first stage is a pretreatment step designed to remove contaminants that could interfere with the process. The second stage is a polishing step that helps achieve the desired profile and surface finish. The third stage is a protective layer etching step that applies a hard protective coating to protect the device from external abrasion and corrosion. TOKYO ELECTRON TE 8500P also reduces handling errors and cycle times due to its automatic coating chamber. The chamber prevents coating particles from escaping during the etching process and speeds up cycle times. The chamber is equipped with a refrigerant cover, reducing the process temperature and providing a controlled atmosphere to further ensure uniform etching results. The combination of these features provides a precise and reliable surface chemistry, reducing waste and improving yields. TE 8500 P also optimizes temperature control to maintain uniform temperature across the substrate. This allows for faster etching cycles and precise quality control throughout the process. Additionally, the programmable abrasive detector in the unit allows for precise control of abrasive particles, reducing the risk of substrate damage. The load lock arm machine minimizes substrate-to-substrate contact, further reducing the risk of defects and damage. TOKYO ELECTRON TE 8500 P is an advanced, industrial-grade etcher/aser tool designed to produce high-quality, repeatable results. By combining advanced features and precise temperature and accurate surface control, this asset provides an efficient, reliable etching solution. Its advanced features and automated processes allow it to maintain an ultra-high throughput, making it a popular choice for manufacturers of advanced semiconductor devices.
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