Used TEL / TOKYO ELECTRON TE 8500PATC #9236832 for sale

TEL / TOKYO ELECTRON TE 8500PATC etcher/asher is an advanced patterning platform designed to provide the highest levels of process control and precision for applications in the semiconductor industry. This equipment features a high-throughput, cost-effective platform with the flexibility to run a variety of different etching processes. The system utilizes advanced dry etching technology to provide precise patterning in areas as small as 0.13um. The unit comprises of five core subsystems- the plasma control, the etching chamber, the high-precision mechanical scanner, the load lock machine, and the vacuum tool. The plasma control asset is used to monitor and control plasma parameters, such as ion density, ions-to-electron ratio, chamber pressure, and temperature. The etching chamber is encased in an isolated chamber in order to provide a clean working environment. The high-accuracy mechanical scanner is used to precisely control the electrostatic field between the source and target, enabling precise patterning. The load lock model is used to rapidly transfer substrates from the transfer chamber to the etching chamber. Finally, the vacuum equipment is used to ensure that the entire assembly is airtight and functional. The system is designed with a high level of automation to reduce process variables and enhance throughput. Each substrate can be configured with pre-defined etching parameters, allowing for a continuous and efficient etching process. The unit comes equipped with an embedded platform with integrated motion-control unit and core process algorithms to ensure that each process step is precisely repeated with consistency. The machine can also be connected to peripheral equipment such as particle monitors, gas monitors, wafer-handling systems and load locks, allowing for integration into the factory line and further improving productivity. The total imaging area of TEL TE 8500PARTC tool is 700 by 700 mm, making it ideal for large-sized semiconductor devices. The asset also boasts a high repeatability rate of 99%, ensuring that consistently high-quality devices are produced each turn. The substrate can be configured to etch in any direction and orientation, and the automated process control ensures that precise and consistent results are obtained each time. TEL TE 8500PATC etcher/asher is an advanced model designed to offer the highest levels of accuracy and process control. Its high accuracy and repeatability, combined with a high throughput, make it an ideal solution for complex patterning processes in the semiconductor industry.