Used TEL / TOKYO ELECTRON TE 8500PE #155452 for sale

TEL / TOKYO ELECTRON TE 8500PE is an etcher/asher specifically designed for high-throughput, precision etching and ashing processes. It offers superior accuracy with a maximum achievable resolution of 1.02 µm and 50 µm for etching and ashing respectively, resulting in thinner film thickness. The equipment is also capable of processing a wide range of materials, such as silicon oxide, silicon nitride, and titanium nitride, enabling the fabrication of miniaturized and high-density devices. TEL TE 8500PE has a high gas flow rate up to 2,500 sccm and up to forty-four high-speed recipe programs stored in its internal memory, allowing users to rapidly program and change between different recipes. TOKYO ELECTRON TE 8500 PE also features a powerful embedded computer operating system with a user-friendly graphical interface, making recipe setup and parameter adjustments easy. Other features include a dual cathode RF power supply up to 7KW and a process monitoring unit for real-time data collection. TE 8500PE is equipped with an automated cassette-to-cassette wafer transport machine that can process up to 200 wafers at a time, ensuring high-throughput and high-accuracy processes. Additionally, the tool has an auto-checkout feature to monitor and adjust the recipe parameters for process stability. Precise control over temperature, pressure, and other etching and ashing parameters is provided by the closed-loop control asset, allowing users to achieve high repeatability. Along with the process controls, TOKYO ELECTRON TE 8500PE is also equipped with safety features such as a multiple load-lock mechanism and a safety shield to protect the operator from radiation. The etcher/asher also has an automatic cleaning cycle and features quick maintenance with optimized industrial design that reduces operating costs. TE 8500 PE is an ideal etcher/asher for precision etching and ashing processes, offering superior accuracy and repeatability, high-throughput, a wide range of process materials, powerful features, and safety features.