Used TEL / TOKYO ELECTRON TE 8500PE #197617 for sale

TEL / TOKYO ELECTRON TE 8500PE
ID: 197617
Wafer Size: 8"
Vintage: 1993
Oxide etcher, 8" 1993 vintage.
TEL / TOKYO ELECTRON TE 8500PE is an advanced dry-etch type etcher / asher designed for the processing of semiconductor substrates. This instrument is used for the precise high resolution deposition of thin films on the surface of wafers. The equipment provides excellent process control and has many features designed to ensure repeatable process results. TEL TE 8500PE performs etching at high speed and with little particle contamination. The etcher is equipped with a plasma source and direct RF generator, which permits a wide range of different etching techniques to be employed. The precise control of parameters such as pressure, power, and gas flow enables the user to specify and never compromise on the critical process result. A high vacuum pumping system is employed to maintain a stable and clean atmosphere during the etching process. This is accomplished by maintaining a low level of particles and gas molecules in the chamber. In addition to etching, TOKYO ELECTRON TE 8500 PE is capable of performing dry etching of titanium tungsten and other materials. It also makes possible the deposition of resist or silica and other chemical components during the process, which make the surface more uniform in addition to etching. The unit is well suited for precision and repeatable etching of depth, width, and surface area control. In terms of safety and protection mechanisms, TEL TE 8500 PE has features that ensure safe operation of the instrument. There is radiation protection in place in the form of a magnetic shielding, which protects the users from harmful radiation. Additionally, the machine is provided with an anti-contamination filter which prevents the entry of any dust or other particles into the etcher/ asher chamber. This is particularly important for the prevention of potential damage to the product. TOKYO ELECTRON TE 8500PE is an ideal etcher for the production of high-precision components. With its advanced features and excellent process control, it is capable of producing repeatable results that meet the highest industry standards. The instrument also offers the assurance of safety and contamination control to ensure the product quality.
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