Used TEL / TOKYO ELECTRON TE 8500PE #293643486 for sale

TEL / TOKYO ELECTRON TE 8500PE
ID: 293643486
Vintage: 1993
Dry etcher 1993 vintage.
TEL / TOKYO ELECTRON TE 8500PE is an etcher (also known as an asher) that is used to create electrical components from a variety of substrates such as plastics, metals, and ceramics. TEL TE 8500PE is equipped with a 500mm x 500mm quartz chamber and has a high-speed substrate transportation equipment with a capacity of up to 200 wafers/load. This system is designed to provide ultra-smooth and uniform etching processes. TOKYO ELECTRON TE 8500 PE offers a variety of process capabilities, including Vacuum Plasma Etching (VPE), Reactive Ion Etching (RIE), Plasma Enhanced Chemical Vapor Deposition (PECVD), Inductively Coupled Plasma (ICP), and Atomic Layer Deposition (ALD). TEL / TOKYO ELECTRON TE 8500 PE is equipped with an advanced process control unit to ensure process stability. This machine includes a closed-loop temperature control tool, a pressure monitoring asset, a process pressure control model, a process gas flow monitor, and a mass flow controller for controlling the process pressure, temperature, and gas flow. Additionally, TOKYO ELECTRON TE 8500PE includes built-in software for analyzing the process and predicting yield. TEL TE 8500 PE also offers a wide range of optional features and accessories to further enhance its performance. These accessories include an RF power generator for creating a stronger plasma for demanding processes, a quartz exposure head for supporting exposure processes, additional process gas sources for enhancing the process selectivity, and a sample finder for locating samples after an exposure. TE 8500PE is an incredibly versatile machine that provides reliable and repeatable results when used to create microprocessors, transistors, and other components. Its advanced control systems and wide selection of optional features make it one of the most popular etchers on the market.
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