Used TEL / TOKYO ELECTRON TE 8500PE #293643494 for sale

TEL / TOKYO ELECTRON TE 8500PE is a high-performance, next-generation etcher / asher used in the semiconductor manufacturing industry. It offers superior process performance utilizing non-process operation and automated material management. TEL TE 8500PE boasts a large etch chamber of 300 mm, which is capable of accommodating up to 8 wafers at once. The etcher also offers highly precise control of etching parameters, including etch rate, levelling, freeform, etch profile and uniformity, as well as selectable resistivity levels. TOKYO ELECTRON TE 8500 PE utilizes state-of-the-art chemical vapor deposition (CVD) technology, which produces a thin layer of film onto the etch surface. By adjusting temperature and pressure, the CVD process can be used to adjust the chemical reactivity and selectivity of the etch process. This allows TE 8500 PE to create patterns with extremely fine structures and reduced feature size. TEL / TOKYO ELECTRON TE 8500 PE also offers a wide range of process options, with multiple materials including low-k, organics, doped, and CMP capable processes available. The etcher also includes advanced process automation capabilities, with online wafer mapping, OCR, yield monitoring and data processing options available, allowing users to quickly optimize their processes and increase overall productivity. TE 8500PE is capable of handling an array of different etch chemistries, with both wet and dry etch processes available. It can be configured for both RIE (Reactive Ion Etching) and DRIE (Deep Reactive Ion Etching) processes, with a variety of chemistry options thanks to its large heated showerhead, durable stainless steel chamber, and adjustable process gas control. TOKYO ELECTRON TE 8500PE is designed for ease of use and maintenance. The system features a user-friendly interface, display and sensors for user convenience, as well as a suite of onboard self-diagnosis and maintenance utilities, allowing users to quickly troubleshoot and evaluate etch results. Overall, TEL TE 8500 PE provides high-precision etch performance and process flexibility. Thanks to its advanced automation capabilities and user-friendly design, the etcher / asher is ideal for a range of semiconductor manufacturing applications.