Used TEL / TOKYO ELECTRON TE 8500PE #9158083 for sale

TEL / TOKYO ELECTRON TE 8500PE
ID: 9158083
Wafer Size: 8"
Oxide etcher, 8".
TEL / TOKYO ELECTRON TE 8500PE is an etcher / asher that combines advanced plasma processing with a wide range of etch/ash capabilities. This model is designed to provide superior quality processing with minimal downtime and lower overall maintenance costs. This equipment features a unique edge-rounded wall technology for improved etch uniformity and is is equipped with an MFF™ (MultipleFrequency Generator) which ensures consistent etch/ash performance. TEL TE 8500PE etcher / asher is equipped with SoftCath™ plasma, EMC™ electron beam source and advanced plasma source sensor technologies which enable improved selectivity and higher etch rates compared to other etchers. The system also features multiple recipe support, process automation, an intuitive user interface, and the ability to save customized profiles. TOKYO ELECTRON TE 8500 PE etcher / asher features a high vacuum unit and advanced gas delivery machine which enables precise gas flow control. This tool has maximum process temperatures of up to 700℃ and high ion energies of up to 30 eV for maximum surface activation. TEL / TOKYO ELECTRON TE 8500 PE etcher / asher comes with various process monitoring and control options, including a real-time chamber monitoring, precise control of process conditions, and on-board diagnostics. This asset is also compatible with other etcher / ashers systems and process chambers from TEL and other manufacturers. With all of these features, TE 8500 PE etcher / asher is an ideal choice for organizations that require advanced etch/ash capabilities with minimal downtime and cost savings.
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