Used TEL / TOKYO ELECTRON TE 8500S ESC #9194482 for sale

TEL / TOKYO ELECTRON TE 8500S ESC is a high-performance etcher/asher manufactured by TEL. It is a multi-chamber equipment that consists of two separate chambers, one for etching and one for ashing. This allows for high throughput and low substrate-to-substrate variation. The system has several advanced features that provide flexibility and ease-of-use. The etcher chamber of the 8500S contains a three-zone source containing oxygen, helium, and chlorine-based source gases for optimized etching of various materials. The asher chamber is designed to handle both metal and dielectric layers by providing precise levels of control over the gas flow. The asher also provides the capability to program and control the quantity/ratio of the gas-flow for any ashing operation. In both chambers, the 8500S is equipped with a configurable etching/ashing chamber and platen geometry which provides uniform and repeatable etching/ashing performance. Additionally, the unit has a user-friendly software interface that allows detailed control over the process parameters and recipe development. TEL TE 8500S ESC also features advanced safety measures like a locked-in operation and environment protection machine, which prevents any type of accidents and ensures a safe environment. Additionally, the tool has automated error detection and correction functions which reduce the chances of process and asset errors. The 8500S utilizes a vacuum-controlled atmospheric environment to ensure a clean, contaminant free etching and ashing environment. The model also has features a gas injection equipment, which allows for the introduction of foreign gases such as radicals or molecules like chlorine or fluorine. TOKYO ELECTRON TE 8500S ESC is a highly reliable etcher/asher, providing users with the reliability, speed, and high-performance necessary for their industrial purposes. The chamber is compact and easily integrated with other systems. With advanced features like automated error detection, user-friendly software, and a configurable etching/ashing chamber, the 8500S ESC provides efficient and precise etching and ashing performance.