Used TEL / TOKYO ELECTRON TE 8500S #293643118 for sale

TEL / TOKYO ELECTRON TE 8500S
ID: 293643118
Wafer Size: 8"
Vintage: 1994
Dry etcher, 8" 1994 vintage.
TEL / TOKYO ELECTRON TE 8500S etcher/asher is an advanced etch/ash equipment used for a variety of etching and ashing processes. It is a static process-altering system capable of adjusting the etching and ashing process parameters to suit the customer's specific needs. This unit is capable of low-temperature, high-resolution etching and ashing processes, as well as complex multi-step processing, and works with a wide range of materials. TEL TE 8500(S) has a compact design which includes an oven, conveyor, load lock, process chamber and wafer transfer machine. It also includes two in-situ ashing process chambers, each capable of operating independently in a parallel configuration, that allow for precise control of the etch/ash process parameters for a wide range of etching and ashing requirements. The process chamber features the ability to process 20inch wafers with a max pressure of 220 m Torr and temperature up to 180℃. TOKYO ELECTRON TE 8500 (S) is equipped with an advanced auto-tuning tool that enables users to easily adjust process settings. It also features a user selectable gas distribution control asset that allows for precise process parameters, as well as an advanced monitoring model for controlling the etch/ash process. It also includes a number of safety features such as ESD detection, overpressure protection, and toxic gas leak monitoring to ensure safe operation. In addition to its sophisticated equipment design, TE 8500S is also stocked with a range of advanced process software. Its Process Chemist software allows users to customize and fine-tune process recipes as needed, while its Process Commander software allows users to control the system parameters in various ways. TEL / TOKYO ELECTRON TE 8500(S) is also compatible with SIEMENS and Agilent AssetView systems, allowing users to easily track and analyze unit data. TOKYO ELECTRON TE 8500(S) offers a variety of features and functions that make it a versatile etcher/asher perfect for a variety of etching and ashing processes. Its advanced machine design, safety features, and range of process software make it an ideal choice for any etching and ashing application.
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