Used TEL / TOKYO ELECTRON TE 8500S #293811570 for sale

TEL / TOKYO ELECTRON TE 8500S
ID: 293811570
Wafer Size: 6"
Etcher, 6".
TEL / TOKYO ELECTRON TE 8500S is an etcher/asher used in the creation of integrated circuits, which are used in a wide range of industries and applications. The etcher/asher is a critical part of the fabrication process and is used to create precise circuits from silicon wafers or glass substrates. It utilizes electromagnetic energy to remove material from the substrate, allowing for extremely precise control over the geometry, thickness and other features of the circuit. TEL TE 8500(S) features an energy beam source, capable of delivering power up to 2200 watts in a spot size as small as 30 microns. This enables the user to etch features with submicron precision, with the ability to achieve line widths far below the wavelength of light. The source provides a wide range of operating frequencies from 20 to 150kHz, and can work at vacuum pressures down to 25 mTorr. A pneumatically driven pressure stage is provided, enabling the user to precisely align the substrate flat to the wafer surface. This allows for a focused laser beam and more precise etching. TOKYO ELECTRON TE 8500 (S) also features a patented adjustable focus guide, enabling the user to adjust the focal point of the laser beam. This, along with the 316 stainless steel chamber has an excellent corrosion and wear resistant design. TE 8500 (S) has an all-in-one design, featuring high precision rotary and lift stages, a digital display and keyboard input, and touch-sensitive operation. A built-in safety system is included, with emergency stop and interlock features, as well as automatic shutoff and air cooling systems. TOKYO ELECTRON TE 8500S is designed to handle a wide range of applications, from wafer/substrate etching/ashing to tool fabrication and R&D. Its superior accuracy and reliable safety features make it the perfect etcher/asher for the fabrication of integrated circuits.
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