Used TEL / TOKYO ELECTRON TE 8500S #9148390 for sale

TEL / TOKYO ELECTRON TE 8500S is an advanced etching and ashing systems designed for batch processing of up to 150 wafers at a time. It features a flexible architecture with independent plasma processing chambers, three-dimensional processing chamber motion capabilities, and a wide range of etching and ashing technologies. The equipment utilizes single wafer and double-sided processing, with high-precision potential energy control and high-quality process monitoring. Using low-noise, high-power RF and DC power supplies with advanced auto-regulation technology, the system is able to deliver exceptional levels of repeatability and uniformity. It offers ultra-high etching resolution and precise etch-by-range or etch-by-step control with real-time etching and ashing monitoring in both on-line and off-line modes. The unit can achiev repeatable results across a wide range of wafer dimensions and configurations. TEL TE 8500(S) also features automated substrate recognition and precision three-dimensional tray motion and positioning capabilities for maximum flexibility. It provides advanced etch management features such as over-etch protection, rapid-etch control, and rapid-stop control, ensuring safe processing of delicate substrates. The machine's innovative process uniformity monitors enable uniform plasma etching across the entire wafer area. In addition, TOKYO ELECTRON TE 8500 (S) offers precise control of etch, ashing, and deposition processes and provides advanced substrate cleaning and de-paneling functions. It utilizes advanced process chamber heating and cooling to optimize etch performance. Finally, it includes a powerful recipe language allowing dynamic process parameter adjustment. With its advanced features and capabilities, TE 8500 (S) is an ideal etching and ashing systems for high-precision batch processing of up to 150 wafers at a time. It is capable of achieving repeatable results with high precision and accuracy.