Used TEL / TOKYO ELECTRON TE 8500S #9269148 for sale

TEL / TOKYO ELECTRON TE 8500S is an etcher/asher designed to fabricate various types of substrates made of materials such as silicon wafers, quartz, and crystalline materials. It is equipped with a high-precision controlling equipment and high-throughput plasma source. This system is able to process the substrate with high accuracy, delivering a superior etching result. It is equipped with a multi-gas flow controller and a multi-zone process chamber that allows for an accurate and high-quality etching process in all target conditions. It is also designed with an integrated closed-loop control unit with a high-precision temperature sensor that ensures process stability and uniformity. Furthermore, TEL TE 8500(S) provides ultra-high-resolution patterning capability to yield improved pattern fidelity and selectivity. TOKYO ELECTRON TE 8500 (S) features a high-resolution plasma source with high-density ion energy that helps create uniform etching patterns. It also has a wafer-level heating machine that facilitates a higher adhesion rate and better-formed patterns. The machine enables accurate deposition of layers with uniform thickness and resistivity by using high-density ion beams combined with direct current (DC) and radio frequency (RF) effects. In addition, TEL TE 8500 (S) is designed with an automatic wafer transfer tool that allows for quick and accurate loading and unloading of substrates without compromising the process stability. It is outfitted with a high-performance automated chamber cleaning asset that ensures efficient maintenance and cycle times with respect to cleanliness. It supports various chemistries and automation opportunities for multiple substrates. TE 8500S provides excellent etching performance, and is suitable for applications in semiconductor device manufacturing and research. It is also an ideal tool for thin film deposition and etching processes for medical, automotive, aerospace, and nanomaterials.