Used TEL / TOKYO ELECTRON TE 8500S #9316073 for sale

TEL / TOKYO ELECTRON TE 8500S is an advanced etcher / asher for semiconductors that is designed to offer superior precision and productivity. This etcher / asher is suitable for a wide variety of processes, including annealing, chemical vapor deposition (CVD), physical vapor deposition (PVD), sputtering, and ion-beam etching. It comes with features including high-speed wafer transfer, multi-step recipe control, auto end-point detection, low backside etching, and high-precision dose control. TEL TE 8500(S) has a powerful vacuum chamber, which effectively controls the process conditions for a variety of etching processes such as isolation or deep etch. This etcher / asher utilizes the Magnetron-type high frequency inverter power source to deliver superior and more uniform ion beam etching performance. It also features a wide variety of source gas injectors for a uniform and clean etching, with low surface roughness. This etcher / asher is able to process wafers up to 8 inches in size in a single run. TOKYO ELECTRON TE 8500 (S) has an intuitive graphical user interface (GUI) to ease daily operation and maintenance. It also features a Visual Inspection System (VIS) that helps monitor the processing steps. Furthermore, this etcher / asher has an emergency stop system and multiple safety systems in place to guarantee the safety of users and equipment. It also provides a very stable power source, with dynamic waveform control, to achieve more accurate dosage control. TEL TE 8500 (S) provides high accuracy and repeatability for etching process parameters, due to its dual-stage valve technology. It also uses advanced pulse pattern recognition to provide immediate and auto adjustment to the ideal etching profile. This enables the etcher to produce extremely high yield and reliability for process results. Overall, TE 8500(S) is a top-of-the-line etcher / asher that offers superior precision and productivity. It is ideal for usage in semiconductor R&D and production processes that require a high level of accuracy and repeatability. It features powerful vacuum chamber and advanced sourcing gas injectors, multiple safety systems, a graphical user interface, and a Visual Inspection System (VIS). It also comes equipped with auto-end point detection and dynamic waveform control for extremely accurate dosage control.