Used TEL / TOKYO ELECTRON TE 8501 #9396122 for sale
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TEL / TOKYO ELECTRON TE 8501 is an advanced etch/asher equipment designed to perform a variety of etch and deposition processes in a single system. The unit uses effect-based tools to precisely control the etch or deposition process, allowing users to achieve repeatable results in a cost-effective fashion. The machine is designed to provide exceptional uniformity in etch and deposition results on substrates such as semiconductor wafers, photomasks, MEMS, and nano-scale structures. The tool features an advanced, multi-stage etcher/deposition chamber, making it capable of providing a wide range of etch and deposition processes. The asset is also equipped with several advanced features such as a real-time end point monitoring tool, multiple-track mode, and patterned wafer production support. The model utilizes multiple sources of plasma, inert gases, and RF power to perform a variety of etch and deposition processes. The equipment is further equipped with a high-speed asher for high-throughput applications. It is capable of providing a high-throughput etch/deposition process, allowing users to quickly and efficiently perform their application. The system also provides advanced features such as an automated process control unit which allows for minimal operator interaction during a process. The machine is designed to provide high-performance results in a wide range of etch and deposition applications. It is also designed to be compatible with a large number of process gases and is capable of working with a variety of wafer sizes. The tool includes a computer-based touch-screen user interface, as well as a LAN/WAN-interface for remote control. Finally, the asset is designed to provide maximum productivity and minimal maintenance for users.
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