Used TEL / TOKYO ELECTRON TELFORMULA ALD High-K #9149552 for sale

TEL / TOKYO ELECTRON TELFORMULA ALD High-K is an etcher/asher designed to etch a variety of semiconductor materials, including dielectric materials, metals, and alloys. The machine is a compact, stand-alone etching equipment that offers the flexibility of an on-wafer or batch etching process. It features an integrated quartz-crystal microbalance for ultra-precision measuring of the etch process on a wafer, as well as optical end-point detection of the wafer material. TEL TELFORMULA ALD High-K offers advanced process control with an extended range of process parameters, including advanced power control, thermal oxidation rate, etch rates, etch gas composition, and gas pressure control. The system also provides a user-friendly graphical user interface (GUI) and an advanced cluster-based cluster control for multiple processes. The unit utilizes a linear coaxial RF generator, making it capable of etching material to a precise depth with minimal lateral damage. This feature provides a higher uniformity and better imaging results. The unit also offers accurate thin-film deposition to produce layers with tailored electrical properties and is equipped with a comprehensive tool set to facilitate the implementation of optical lithography. The machine's process gas source allows the user to control the etch rate and select the most suitable gas for a selected process. It is also equipped with a RF bias control unit to provide the optimal ion energy for the etching process. TOKYO ELECTRON TELFORMULA ALD High-K's process chamber also offers adjustable temperature and pressure control to ensure process consistency. Additionally, the machine is designed with a patented thermal growth machine to minimize short-term particle generation and ensure a high level of process consistency. TELFORMULA ALD High-K also offers an automated wafer loading and unloading tool for ease of operation, a computer-based software package for process simulations, and a modular design for easy tool upgrade and expandability. With a comprehensive and easy-to-use software package, the machine is designed to work with a variety of substrates, making it an ideal choice for a wide range of industrial and consumer electronics applications. Offering high performance, flexibility, and accuracy, TEL / TOKYO ELECTRON TELFORMULA ALD High-K is an ideal choice for advanced etching applications.