Used TEL / TOKYO ELECTRON TELINDY A #293763021 for sale
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ID: 293763021
Wafer Size: 12"
Vintage: 2008
Vertical furnace, 12"
Process: HTO
Power supply: 208 V, Single phase / 480 V, 3 Phase
2008 vintage.
TEL / TOKYO ELECTRON TELINDY A is a high-performance etcher/asher equipment designed and manufactured by TEL Limited (TOKYO ELECTRON). As a leading provider of innovative semiconductor manufacturing equipment, TEL / TOKYO ELECTRON has developed TEL TELINDY A to meet the demanding requirements of advanced semiconductor fabrication processes. This system is widely used in research and production facilities for precise etching and cleaning of semiconductor materials, helping to achieve high device performance and yield in the semiconductor industry. TOKYO ELECTRON TELINDY A is equipped with a range of advanced features and technologies that enable precise and efficient processing of semiconductor wafers. The unit is a versatile tool that can perform both dry etching and plasma ashing processes, making it suitable for a wide range of applications in semiconductor manufacturing. The etching process is essential for defining circuit patterns on semiconductor wafers, while the asher process is used for removing photoresist materials and residues from the wafer surface. TELINDY A features a high-performance vacuum chamber that is capable of maintaining a controlled environment for the etching and asher processes. The vacuum chamber is equipped with advanced gas delivery systems that enable precise control of process gases and flow rates, ensuring uniform etching and ashing results across the wafer surface. The machine also incorporates plasma generation technology to create a highly reactive plasma environment for efficient material removal and surface modification. One of the key advantages of TEL / TOKYO ELECTRON TELINDY A is its advanced process control capabilities, which enable users to achieve precise control over etching and asher parameters. The tool is equipped with a sophisticated process control unit that monitors key process variables such as gas composition, pressure, temperature, and plasma power. By adjusting these parameters in real-time, users can optimize the etching and asher processes to achieve the desired process results with high repeatability and accuracy. TEL TELINDY A is also designed for high-throughput semiconductor manufacturing, with features that enable fast wafer loading and unloading processes. The asset incorporates a robotic wafer handling model that automates the wafer transfer process, reducing the risk of contamination and damage to wafers during processing. This automation feature helps to improve overall process efficiency and productivity, making TOKYO ELECTRON TELINDY A an ideal tool for high-volume semiconductor production environments. In addition to its advanced process control and automation capabilities, TELINDY A is also equipped with advanced safety features to ensure user protection and equipment reliability. The equipment is designed with multiple safety interlocks and emergency shutdown mechanisms to prevent accidents and equipment damage during operation. Furthermore, the system is built with high-quality materials and components that are resistant to corrosion and wear, ensuring long-term reliability and performance in semiconductor manufacturing operations. Overall, TEL / TOKYO ELECTRON TELINDY A is a high-performance etcher/asher unit that offers advanced process control, automation, and safety features for precise and efficient semiconductor manufacturing. With its versatile capabilities and innovative technologies, TEL TELINDY A is a valuable tool for researchers and semiconductor manufacturers seeking to achieve high device performance and yield in the competitive semiconductor industry.
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