Used TEL / TOKYO ELECTRON TELINDY B #293763018 for sale
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ID: 293763018
Wafer Size: 12"
Vintage: 2011
Vertical furnace, 12"
Process: HiK Dielectric
Power supply: 208 V, Single phase / 480 V, 3 Phase
2011 vintage.
TEL / TOKYO ELECTRON TELINDY B is a type of etcher, also known as an asher. It is a semiconductor and photovoltaic device fabrication equipment comprising a vacuum system, a process source unit, and a process unit. It uses electron beam technology and a dedicated software machine to control the etch process in both uniformity and accuracy. The etcher relies on three main components of its tool - the vacuum asset, the process source model, and the process unit. The vacuum equipment pumps out air and gas from the chamber and central to it is the turbomolecular pump. On the other hand, the process source system plays a key role in supplying the plasma source gas, which are accessed through an integrated network of mass flow controllers, pressure controllers, and multi-gas perforated tubes. Lastly, the process unit delivers the etch process within the chamber by controlling the applied gas pressures, flow rates, power and timing of the unit. TEL TELINDY B etcher can offer high accuracy and control within the etching process due to the electron-beam evaporator. This beam is used to control the evaporation of thin films sources in thickness control and it also has the ability to selectively coat plates. The etcher also allows for the arrangement of many process layers for etching through the use of a wafer CD (critical dimension) measurement machine. TOKYO ELECTRON TELINDY B etcher also has excellent temperature control capabilities, which can help regulate uniformity amongst different substrates. One of the added benefits of this etcher is that the operator has the ability to utilize process parameters such as chamber pressure, cooling gas pressure, and gas flow rate in order to tailor the etching process to their needs. Finally, the etcher is highly advanced as it is equipped with an intuitive software tool that allows the operator to optimize the etching process as well as automate many of the tasks. This makes it easier for the operator to adjust different process parameters and be sure that the outcome of the etching process is consistent and accurate. Overall, TELINDY B is a highly advanced etcher which features an electron beam evaporator to ensure accuracy and control over the etching process. Operators can utilize the process parameters to tailor the etching process to their needs, while the intuitive software asset ensures ease of use and automation of certain tasks.
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