Used TEL / TOKYO ELECTRON TELINDY Nitride #9219405 for sale

TEL / TOKYO ELECTRON TELINDY Nitride (TELINDY) is an etcher/asher designed for deposition of oxide, nitride or metal intermetallic films. It is a versatile tool that can be used to create a multitude of integrated circuit components with high temperatures. TEL TELINDY Nitride equipment offers automated processing and programmable recipe controls. It comes with a complete set of features and accessories that include a proprietary furnace, a high vacuum system, an RF or DC powered plasma source, and up to two dual gas-mode sources. The feature-rich unit can process film layers from one-quarter to one-half micron thick with highly precise control, and produce films of consistently high quality. The furnace within the TELINDY machine is capable of heating up to 1200°C with maximum power of 3.2kW. It has an enlarged heating space with an adjustable susceptor along with an integrated substrate holder for better deposition efficiency. The tool is also equipped with a high vacuum asset capable of achieving a base pressure of 3x10-7 Torr. The plasma source is used to provide a clean base-etch prior to film deposition. A device such as a Faraday cage or electrostatic chuck can be used for controlling plasma activity. This model is powered by RF up to 500 watts or DC up to 1200 watts. The dual gas-mode sources feature a variety of gas types, including Ar, H2O2, O2, SiH4, and CH4, to perform both gate oxide etching and deposition. The TELINDY equipment is reliable, precise, and efficient. Its advanced physical vapor deposition (PVD) technology has been optimized to ensure a high-quality nitride film for cutting edge IC components. The system's features make it one of the most popular etcher/asher systems in the integrated circuit industry.