Used TEL / TOKYO ELECTRON TELINDY Oxide #9253819 for sale

TEL / TOKYO ELECTRON TELINDY Oxide (often abbreviated to TEL Oxide) is a state-of-the-art dry plasma etcher and asher from industry-leading TOKYO ELECTRON and TEL / TOKYO ELECTRON. TEL Oxide is the ideal tool for high precision metal oxide etching, oxide ashing, and surface cleaning. TOKYO ELECTRON Oxide is unique in that it collimates the plasma beam just before the substrate creating a uniform distribution of oxygen and other reactive gases, resulting in a consistent etch profile. This makes TEL / TOKYO ELECTRON Oxide a favorite for metal and metal oxide etching that require deep, volatile etch patterns. TEL Oxide is a single-chamber dry etcher that simplifies the etch process. It uses single wafer tools to etch metal oxide substrates. It also uses a remote showerhead to allow for oblique incidence etching and to direct the etching beam to just the areas which require increased etching. Its features include an integrated electron balancer, allowing for precise process control. TOKYO ELECTRON Oxide also has automatic adjustments for oxygen versus arsenic levels for reliable operation and improved process results. In addition, it is equipped with an anti-static system, offering great protection against static electric fields. TEL / TOKYO ELECTRON Oxide also has built-in temperature control and gas distribution systems, two key components necessary for successful plasma etching and oxidation. The temperature control system helps stabilize temperature to ensure consistent etch results. The gas distribution system ensures optimal injection of an even distribution of the reactive gas throughout the chamber. In addition, TEL Oxide has the unmatched versatility to span a wide range of etch processes. It supports small etch applications such as those used in MEMs devices as well as larger, more complex etch applications such as those used in thin film transistors and other high-end applications. TOKYO ELECTRON Oxide is ideal for customers who require reliable and powerful etching capabilities for metal and metal oxide substrates. This state-of-the-art dry etcher/asher provides industry-leading features and capabilities and is the perfect tool for precision etching and oxidation.