Used TEL / TOKYO ELECTRON TELINDY Oxide #9311153 for sale

TEL / TOKYO ELECTRON TELINDY Oxide
ID: 9311153
Wafer Size: 12"
Vertical LPCVD furnace, 12".
TEL / TOKYO ELECTRON TELINDY Oxide is an advanced device for etching and ashing semiconductor wafers. It uses wet chemical etching to deposit a layer of oxide of a specific thickness over an underlying substrate. This oxide layer can then be used in a variety of applications such as isolation in integrated circuits, dielectric layers in microwave and antenna applications, surface passivation in electronic devices, or protection from ultraviolet light in optoelectronic devices. TEL TELINDY Oxide is equipped with a high performance, low-volume, pumped-in chemical storage equipment which allows it to operate in an efficient, precise, and effective manner. The device is in a closed system, preventing hazardous chemicals from escaping into the environment. Its automated chemical delivery unit offers precise control over the oxide deposition process, allowing for precise thicknesses. The device utilizes a computer-controlled bath temperature and gas pressure to achieve optimum etching performance. The machine also incorporates airflow control for greater accuracy and uniformity. The combination of these features allows TOKYO ELECTRON TELINDY Oxide to maintain consistent oxide deposition during successive batches and across different wafer sizes. The device is designed with an automatic temperature control tool for maintaining a constant temperature during etching processes. This helps the device reach the widest range of temperatures without having to manually adjust the temperature settings. Additionally, the device can work with different types of masks and wafers, reducing the need for new masks and wafers during production processes. The device also has an auto-capping feature which helps protect the wafer from physical damage or chemical contamination during the etching process. The asset also includes differential pumping with the use of a vacuum at the bottom of the process vessel. This is useful in preventing the accumulation of particulate inside the vessel. Finally, the model is equipped with a diagnostic feature that can detect any faults with the device and quickly alert the operator so that corrective action can be taken. In summary, TELINDY Oxide is an advanced etcher/asher for semiconductor wafers. It uses wet chemical etching to deposit a layer of oxide with precision, providing uniformity across different wafer sizes. The device is designed with automated chemical delivery and temperature control systems, as well as other features such as auto-capping and differential pumping. The diagnostics feature helps to detect any faults or irregularities with the device, ensuring smooth operation and reliable results.
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