Used TEL / TOKYO ELECTRON TELINDY Plus A-M #9223290 for sale

TEL / TOKYO ELECTRON TELINDY Plus A-M is an etcher / asher equipment used in semiconductor device fabrication. It is designed for photoresist stripping and etching applications in IC manufacturing processes, providing efficient and precise etching of features onto substrates. The system is built with a 3-axis X-Y stage, a rack lift unit, an platform and a roll turner. The motion drivers are powered by servo motors for faster and smoother motion. It also has a PLC machine with an attached PC, allowing for remote monitoring of production processes. The X-Y stage allows for precise and accurate pattern placement for both etching and stripping. With its integrated dual tracking mechanism, users can accurately scan and track substrates in the X-Y direction in order to position features prior to etching. The tool is also equipped with multiple etching/stripping source selections, including both Ethernet and Ozone sources, allowing for higher throughput and more efficient processes. TEL TELINDY Plus A-M also features a completely enclosed, state-of-the-art chamber design. The stainless steel chamber reduces the possibility of particle and other contamination, leading to higher-quality, reproducible results. The chamber is equipped with 20 station precision machinery for enhanced control of the etching and stripping process. The asset also has a cross-sectional imaging model and a substrate inspection equipment, allowing for real-time monitoring of etching and stripping processes. TOKYO ELECTRON TELINDY Plus A-M is designed for maximum productivity with high levels of functionality. The system features integrated height measurement, advanced motion control, and a substrate-loading unit that reduces errors during transport and substrate loading. It also has multi-site process control for easy processing and improved reproduction accuracy. Additionally, the machine is equipped with an integrated gas scrubber for improved safety and full integration of control systems. In conclusion, TELINDY Plus A-M is an etcher/asher tool designed for use in semiconductor device fabrication. The asset incorporates advanced features and technologies, such as a 3-axis X-Y stage, a rack lift model, an cross-sectional imaging equipment, and a substrate inspection system. Its height measurement unit, advanced motion control, and integrated gas scrubber allow for more efficient and accurate etching/stripping process. With its advanced design and integrated features, the machine provides users a reliable solution for IC manufacturing processes.