Used TEL / TOKYO ELECTRON TELINDY Plus ALD High-K #293597784 for sale

TEL / TOKYO ELECTRON TELINDY Plus ALD High-K is a type of etcher or asher that is used for various thin film deposition and processing techniques. It is primarily used in the manufacturing of semiconductor devices. TEL TELINDY Plus ALD High-K is equipped with a highly stable and repeatable recipe management equipment that allows reproducibility in the process. The etcher also has a low particle count design that ensures clean manufacturing. TOKYO ELECTRON TELINDY Plus ALD High-K is a comprehensive system for thin film deposition and etching. It has vacuum compatibility up to 1.3x10-6 Torr and features a multi-wafer batch unit. The etcher is also equipped with a multi-chamber machine which can perform sequential processing and deposition techniques with improved productivity and delivery. The tool also contains several source lines. An Inductively Coupled Plasma (ICP) source lines allows direct plasma processes, such as etching, ashing and deposition. The magnetic line source also has reactive ion etching (RIE) capability. The chamber has a recipe-controlled programmable temperature chamber that is designed for ultra-high vacuum processing. The chamber also has various safety features, such as O2 and H2 sensors, a reaction chamber interlock asset, and production stop during contamination. The model further has a data logging equipment which makes it possible to record wafer processing and deposition results. TELINDY Plus ALD High-K is a reliable etching system that can effectively and efficiently integrate into any semiconductor device production line. It is a versatile tool that can be used for various etching, ashing and other thin film deposition tasks. It features a robust infrastructure and safety features that ensure clean and efficient production.