Used TEL / TOKYO ELECTRON TELINDY Plus ALD High-K #293665667 for sale

TEL / TOKYO ELECTRON TELINDY Plus ALD High-K etcher / asher is a state-of-the-art equipment for creating high-quality thin-film coatings and interconnects on semiconductor substrates. It uses plasma-enhanced atomic layer deposition (ALD) to deposit high-k materials - materials whose dielectric constants exceed those of silicon dioxide (SiO2) - on substrates. TEL TELINDY Plus ALD High-K system is a full-fledged etching unit, capable of both patterning and thinning of films in one step. The etcher is designed for use with high-k films that could not be used in a traditional dry etching machine, but can now be patterned and etched with TOKYO ELECTRON TELINDY Plus ALD High-K. The etcher features a large process chamber equipped with advanced etching and deposition hardware, as well as an intelligent process control tool that provides precise process monitoring and control. The process chamber is constructed of stainless steel and is capable of controlling each process parameter safely and effectively in order to achieve high-quality results. The asset also features advanced optics and diagnostic equipment, including a digital imaging microscope, which allows users to keep a close eye on the thin-film deposition process. The etcher is powered by a proprietary process gas delivery model, which allows for precise control of the deposition rate, film thickness, uniformity, and other important parameters. It is also capable of depositing a variety of materials, such as silicon dioxide, aluminum oxide, tantalum oxide, and titanium nitride, among others. Additionally, the equipment is compatible with a variety of substrates, including those made of silicon, gallium arsenide, low-k dielectrics, and plastic. In addition to its etching capabilities, TELINDY Plus ALD High-K etcher / asher also offers coating and passivation capabilities. It is equipped with advanced deposition software that allows users to select different process recipes for different processes. The software also enables users to quickly create and save processes for etching and deposition, allowing them to quickly switch between processes depending on the requirements of the job. Furthermore, the system's advanced safety features, including ion beam scanners and a Foup Cleaner, ensure that the unit runs safely and reliably for the life of the tool. Overall, TEL / TOKYO ELECTRON TELINDY Plus ALD High-K etcher / asher is a powerful and reliable tool for high-k film processing. The etcher / asher offers precision control of the deposition process, as well as a wide variety of materials and substrates for etching and deposition, making it an ideal choice for advanced semiconductor research and development.