Used TEL / TOKYO ELECTRON TELINDY Plus ALD #293609248 for sale

TEL / TOKYO ELECTRON TELINDY Plus ALD
ID: 293609248
Vertical furnaces.
TEL / TOKYO ELECTRON TELINDY Plus ALD is a high-precision plating equipment used in microelectronics manufacturing processes. It is a combination of two machines - a pre-drying etcher and an asher. The etcher uses radicals to remove chemically etched material, as well as post-etch residue, from the substrate. This process helps prepare the substrate for optimal deposition and plating. The asher also uses radicals to form tight bonds between the substrate and the material being applied, making it an ideal device for high layer-to-layer adhesion. TEL TELINDY Plus ALD can be used for a variety of applications, including plating and physical vapor deposition (PVD). It is capable of etching multiple layers of film and material simultaneously. It is equipped with end-point detection for precise monitoring of process progress and chemistry. The system's primary process chambers are made of stainless steel and are designed to be vigorous-controlling both pressure and temperature. The chambers offer flexibility in terms of size, allowing the operator to plate multiple substrates at once. Additionally, the chamber reduces particle generation, offering a contamination-free environment. TOKYO ELECTRON TELINDY Plus ALD features integrated safety features to ensure a safe operation, including pressure switches, optical interlock sensors, and a code reader and barcode support. Its user interface provides an intuitive interface with parameter settings, graphical indicators, and onboard instructions. Additionally, TELINDY Plus ALD is equipped with an Advanced Control System (ACS) software that controls the entire etch and deposition process. TEL / TOKYO ELECTRON TELINDY Plus ALD is designed to provide cost-effective and repeatable results. Its high-precision etching and ashing processes attain the finest dimensions of microelectronic components. Its process monitoring capabilities improve accuracy and reduce overall risk. Furthermore, its integrated safety devices, user-friendly interface, and automated software make it an ideal etcher and asher for microelectronic manufacturing.
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