Used TEL / TOKYO ELECTRON TELINDY Plus ALD #293638697 for sale
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TEL / TOKYO ELECTRON TELINDY Plus ALD is a highly sophisticated etcher / asher engineered by TEL (TE). It is a state-of-the-art device designed for fabrication of advanced microelectronic and optical components. TEL TELINDY Plus ALD excites atoms with exotic particles and then chemically modified them. This process removes, or 'etches', material from the surface of the chip that is then reused for new layer construction. The resulting thin films can be used for a multitude of electronic and photonic applications. TOKYO ELECTRON TELINDY Plus ALD system employs several advanced etching/deposition technologies. The chemical vapor deposition (CVD) chamber is one of the TELINDY's steps. This chamber vaporizes vapor phase precursors and deposits the reactive species onto the substrate, forming thin and uniform films. The chamber is equipped with high-precision shutters and filters, allowing for precise etching of the desired areas. The electron beam cluster tool delivers high resolution patterns with good conformity for high aspect ratio and high-density materials. This tool impinges a tight beam of electrons onto the substrate and then directs the electrons to etch, form, or develop the feature. The physical vapor deposition (PVD) chamber is also part of TELINDY Plus ALD technology. PVD is used to build vertically complex structures. This chamber incorporates an evaporation source, a shield, and an inert atmosphere to deposit the desired material onto the substrate. TEL / TOKYO ELECTRON TELINDY Plus ALD also employs a variety of sputtering techniques to etch, deposit, and replicate structures. The techniques employ an array of physical or chemical sputtering processes to etch, deposit, and replicate semiconductor-grade material on the chip. TEL TELINDY Plus ALD etcher/asher is an incredibly powerful, precision process tool. It is the perfect etcher/asher to fabricate the most advanced microelectronic and photonic components, due to the utilization of the highest precision components and processes. With its full suite of etching, deposition, and sputtering processes, this machine is capable of producing the highest quality products and results.
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