Used TEL / TOKYO ELECTRON TELINDY Plus ALD #293818326 for sale

TEL / TOKYO ELECTRON TELINDY Plus ALD (Atomic Layer Deposition) is a robust etching equipment that offers a range of semiconductor processing capabilities for both wafer-level and device-level applications. It is highly integrated with a broad range of components such as degas chamber, susceptor, loadlock, end-effector robot, multi-chamber showerhead, reaction chamber, and mini-environment modules. This system is used for applications such as material deposition, reactive ion etching, thermal annealing, and rapid thermal annealing. TEL TELINDY Plus ALD provides superior etch uniformity and outstanding process repeatability on any thickness of the substrate regardless of wafer size. This unit has a closed-loop temperature control capability, allowing the temperature to be precisely controlled during critical etching operations. It offers a large batch processing area that can accommodate large wafers and high-volume production. Additionally, its integrated multi-step etching process enables more complex structure formation for advanced manufacturing process. In addition to its powerful etching capabilities, TOKYO ELECTRON TELINDY Plus ALD also offers well-developed and reliable software tools. It offers integrated recipe manager with open execution control, an integrated multi-step process, real-time furnace machine monitoring, and enhanced gas delivery monitoring. By using this tool, process engineers can easily optimize the etch process to achieve higher throughput with minimum downtime. TELINDY Plus ALD is also designed to provide high-quality etch results. It is capable of generating nanometer-level thick film etch processes. Moreover, it has an optional source of high power radio frequency (RF) energy which enables high-rate etching. The asset is also equipped with advanced laser control for precision substrate etchings. Additionally, it includes a unique frequency conversion controller that enables multiple different etch frequencies to be operated in unison. Overall, TEL / TOKYO ELECTRON TELINDY Plus ALD offers an outstanding etch solution for any wafer-level or device-level process. With its comprehensive software tools and advanced processing capabilities, this model provides a reliable and powerful etch solution for both research and manufacturing. Its precision etch controls, high-rate etch process, and high-quality etch results make it an ideal choice for any industry-level applications.