Used TEL / TOKYO ELECTRON TELINDY Plus ALD #293818327 for sale

TEL / TOKYO ELECTRON TELINDY Plus ALD is an etcher/asher designed for precise deposition of thin films for integrated circuit fabrication. It uses Atomic Layer Deposition (ALD) to create thin films of conformal dimensions in the range of 2-50nm. This allows the creation of structures having precise dimensions and very high conformality. TEL TELINDY Plus ALD features a low-pressure, low-temperature process chamber and an advanced automation/control equipment. The chamber itself is a vacuum system that is temperature- and pressure-controlled to ensure proper etching and deposition. The automated control unit is set up to monitor and control the various parameters of the ALD process such as temperature, pressure, gas flow, and deposition rate. To ensure precise control of the ALD process, TOKYO ELECTRON TELINDY Plus ALD is equipped with an automated gas delivery machine that can precisely control the flow of reaction gases. In addition, the tool has a tooling asset which is designed to provide an optimal ALD process regardless of substrate shape and size. The tooling is designed to use both manual and automated procedures. This allows for the ability to work with a variety of substrates including silicon, quartz, and glass. TELINDY Plus ALD also features an advanced wafer sensing and tracking model for precise film profile control. This equipment is combined with the other process parameters to control the deposition rate and the thickness of the film. The wafer tracking system also allows for the fine control of photoresist processing and mask alignment. In terms of safety, TEL / TOKYO ELECTRON TELINDY Plus ALD is designed to function with minimal risk of harm to personnel or equipment. It features built-in safety features such as chip/wafer processing time limits and pressure limiters in case of unexpected pressure increase. Additionally, the unit is equipped with a vacuum interlock machine to ensure proper safety in case of an accident. Overall, TEL TELINDY Plus ALD is an advanced etcher/asher with numerous features, processes, and safety protocols specifically designed for Atomic Layer Deposition (ALD) applications. It offers precise deposition of thin films with conformal dimensions in the range of 2-50nm, automated gas delivery tool, tooling asset, wafer sensing and tracking model, and safety features. TOKYO ELECTRON TELINDY Plus ALD is a great equipment for fabricating integrated circuits and other electronic components.