Used TEL / TOKYO ELECTRON TELINDY Plus anneal #293638716 for sale

TEL TELINDY Plus Annealing (TOKYO ELECTRON/TE Tangential Etcher/Asher) is a high-precision etching/ashing unit for eliminating residual photoresist on Nanoscale substrates. It is mainly used for applications in the semiconductor, MEMS, and other microelectronic industries. This unit is equipped with the advanced TELINDY Plus controller with a large capacity LCD touch panel. This gives the user the ability to configure many process parameters with precision. This controller allows easy set-up and calibration of the chemical etching time and concentrations, as well as controlling the temperature and pressure in the chemical tank, which can be set up to perform at optimum efficiency. TEL / TOKYO ELECTRON/TE Tangential Etcher/Asher utilizes advanced technology that offers superior chemical etching rates while reducing material loss. This allows etching of fine features such as small trenches, lines and contacts with great accuracy. The unit also provides consistent uniform etching results with a high degree of repeatability. It is suitable for wet etching processes, such as RIE, ECR, and ICP etching, as well as for dry etching processes, such as DRIE, ECR-DRIE, and ECR-ICP etching. It is also able to apply annealing treatments to help improve the adhesion of materials grown on wafers during the process. The unit is also equipped with an advanced Pol-Pol scrubber equipment. This reduces waste generation during the etching process by recovering chemical from the tank and re-circulating it. Furthermore, TEL/TE Tangential Etcher/Asher includes a cooling system, which cools the chemical mixture for increased safety in operation and helps prevent chemical decomposition. TOKYO ELECTRON/TE Tangential Etcher/Asher has a separate vacuum unit, which is useful for eliminating undesirable processes like vapor etching. It also has an eddy current current sensor, which is able to detect substrates during the etching process and accurately measure etching depth. This precision helps ensure consistent results and improve process yield. Furthermore, the unit is equipped with an on board alarm machine which warns of any malfunctions. In conclusion, TEL / TOKYO ELECTRON TELINDY Plus Annealing (TEL/TE Tangential Etcher/Asher) is a high-performance etching/ashing tool designed to provide precise control of critical process parameters and excellent etching rates. With its advanced technology, it is capable of etching a wide variety of substrates and materials, and its inbuilt mechanisms help to reduce waste generation and improve the quality of results.