Used TEL / TOKYO ELECTRON TELINDY Plus High-K #9253810 for sale

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ID: 9253810
Vintage: 2014
Furnace Wafers: 100 Pressure control: APC Valve Process gas: AMPLE System: NxTi TMA: F.S 500 Sccm O3: F.S 20 Slm, 200 g/m3 N2 Octane Vaporizer: STEC (TMA, NXTi) LSC-F530 (TMA) STEC Z500 Series MFC (Mass Flow Controller) Process temperature: 200° to 300° 2014 vintage.
TEL / TOKYO ELECTRON TELINDY Plus High-K is an etcher / asher that is used for the production and maintenance of electronic components. It is specifically designed for high-K process technologies and is capable of producing and maintaining the most critical features in the most advanced integrated circuit designs. TEL TELINDY Plus High-K features a unique dual-plasma technology, allowing the equipment to deliver a more uniform etch pattern. Its high power and high-frequency plasma generator provides stable and reliable etching performance, making it suitable for production and maintenance of high-K device structures. In addition, the etcher is equipped with integrated controllers that provide improved process stability and advanced integrated features to ensure precision etching operation. The system boasts a design that is optimized for process scalability, with the ability to support a variety of wafer sizes. It also offers a wide range of substrate materials, including aluminum, polysilicon, gallium arsenide, indium tin oxide, silicon-on-insulator and deep trenches, making the etcher suitable for all jobs involving high-K processes. It also features a simple, intuitive user interface, allowing you to configure the unit with simple drag and drop. The machine is also equipped with advanced safety features, allowing operator safety in all key steps, including the loading process, as well as reliable maintenance and tool upgrades. TOKYO ELECTRON TELINDY Plus High-K offers the latest in etching technology. Its efficient and reliable operation makes it ideal for the most advanced high-K process applications and it offers complete versatility for substrate compatibility and process scalability. Its intuitive user interface and advanced safety features make it a valuable asset for meeting all of your production and maintenance needs.
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