Used TEL / TOKYO ELECTRON TELINDY Plus-I-M #293763450 for sale
URL successfully copied!
Tap to zoom
ID: 293763450
Wafer Size: 12"
Vintage: 2014
Vertical furnace, 12"
Heating element
(2) Power Boxes
Process: Nitride
2014 vintage.
TEL / TOKYO ELECTRON TELINDY Plus-I-M is a high-performance etcher/asher equipment designed for advanced semiconductor manufacturing processes. It is specifically developed to provide precise and uniform plasma processing capabilities for critical patterning steps in the production of cutting-edge integrated circuits. At the core of TEL TELINDY Plus-I-M system is its advanced plasma etching and ashing technology, which enables the removal of unwanted material layers from semiconductor wafers with high selectivity, uniformity, and throughput. This unit is particularly well-suited for applications requiring tight process control, such as pattern transfer, gate etching, and advanced transistor formation. TOKYO ELECTRON TELINDY Plus-I-M features a robust and reliable vacuum chamber that is designed to maintain high levels of process stability and repeatability. This allows for consistent and predictable etch/ash results across a large number of wafers, ensuring high yield and product quality. The chamber is built with high-quality materials and advanced coatings to prevent contamination and enhance performance. The machine is equipped with a range of advanced process control technologies to optimize etching and ashing performance. This includes a highly accurate gas delivery tool for precise control of process gases, as well as advanced RF power supplies for efficient plasma generation and control. TELINDY Plus-I-M also features advanced endpoint detection systems to ensure accurate process endpoint detection and control. One of the key strengths of TEL / TOKYO ELECTRON TELINDY Plus-I-M asset is its versatility and flexibility in addressing a wide range of process requirements. It offers a variety of process recipes and tuning options to accommodate different material stacks, feature sizes, and pattern densities. This flexibility allows semiconductor manufacturers to tailor the model's operation to meet specific process needs and achieve optimal results for their devices. In terms of performance, TEL TELINDY Plus-I-M offers high etch/ash rates, excellent uniformity, and low variability across the wafer, resulting in precise and consistent processing results. The equipment's advanced gas flow and pressure control mechanisms ensure that the plasma profile is well-maintained throughout the etch/ash process, leading to high-quality pattern transfer and etch selectivity. Furthermore, TOKYO ELECTRON TELINDY Plus-I-M is designed with a focus on reliability and ease of maintenance, with features such as remote diagnostics, predictive maintenance capabilities, and easy access to critical components for servicing. This minimizes system downtime and ensures high productivity for semiconductor manufacturing operations. Overall, TELINDY Plus-I-M is a state-of-the-art etcher/asher unit that combines advanced technology, precision control, and operational flexibility to meet the demanding requirements of semiconductor manufacturing processes. Its high performance, reliability, and process capabilities make it an ideal solution for the production of advanced semiconductor devices.
There are no reviews yet