Used TEL / TOKYO ELECTRON TELINDY Plus Nitride #9243663 for sale

TEL / TOKYO ELECTRON TELINDY Plus Nitride (TEL/TENP) is a high-precision etcher/asher specially designed for the etching and removal of nitride films. It utilizes pulsed microwave plasma technology, along with advanced process control software, to deliver precise process control and precision etching, as well as an extremely rapid process cycle time. TOKYO ELECTRON/TENP features a high-precision etch chamber that can accommodate a variety of substrate sizes and shapes. It utilizes a pulsed, reactive-ion etching (RIE) process to etch or remove nitride films from the substrate. The advanced process control software provides precise control of the etch process, allowing for a wide range of etch processing conditions. The advanced process control software also allows for the optimization of processing conditions, resulting in a much faster etching and ashing speed, as well as improved overall process repeatability and uniformity. TEL / TOKYO ELECTRON/TENP etches films at low RF power and removes nitride films up to 15-50 nanometers in thickness. The etching process is performed at various temperatures, such as room temperature, low temperatures, as well as hot temperatures. In addition, TEL/TENP also features a unique process chamber pressure and temperature control. This includes an automated pressure control system that compensates pressure drop in the chamber, as well as a temperature control system which minimizes the possible temperature variations. TOKYO ELECTRON/TENP features advanced features such as an automated nitrogen control system that allows for the precise control of the nitrogen concentration in the etching chamber. This can be used to optimize the etching and ashing performance. TEL / TOKYO ELECTRON/TENP also features advanced process control software that can be used to monitor and control all device parameters during process execution. In addition, the advanced process control software also features self-diagnosis, recipe management, and process log collection and prediction capabilities. TEL/TENP is an extremely versatile etcher/asher that is ideal for a wide variety of applications and industries. This includes the etching and removal of nitride films and other dielectrics on semiconductor wafers, solar cells, MEMS and other components. As an etcher/asher, TOKYO ELECTRON/TENP is ideal for removing etch obstacles, refining sidewall structure, improving dielectric uniformity, and providing precise etching and ashing. TEL / TOKYO ELECTRON/TENP is also highly reliable and easy to operate and maintain. This makes it the perfect choice for a variety of industries and applications.