Used TEL / TOKYO ELECTRON TELINDY Plus #293640860 for sale

ID: 293640860
Wafer Size: 12"
Vertical furnace, 12".
TEL / TOKYO ELECTRON TELINDY Plus is an etcher / asher equipment used for the manufacture of semiconductor and related devices. The system is used for dry etching of metal layers, oxide layers and other materials. It is the most advanced dry etcher / asher for semiconductor processing and offers a wide range of technologies, such as plasma etching, chemical etching, reactive-ion etching (RIE), inductively coupled plasma (ICP) etching, as well as metal etching that can be used in combination with wet chemical etching. TEL TELINDY Plus unit is a customized machine with full automation capabilities and can easily accommodate special process requirements. It uses a modular tool architecture to maximize the potential of its capabilities. The asset is designed to ensure low downtime and provide process consistency. Its user-friendly control model has remote monitoring and control capability, allowing users to monitor the process from a local or remote location. TOKYO ELECTRON TELINDY Plus equipment is capable of handling a wide range of materials such as metals, oxides, polymers, nitride and dielectrics. The system is suitable for process development and high volume production, and features a closed-loop process that can measure the etch rate during a process run and adjust the process parameters accordingly. The unit also has an adjustable substrate temperature controller for controlling the etching process temperature. The machine is equipped with a variety of process specialty components to meet various etching requirements. It includes features such as a high-pressure and low-temperature etching tool, a deep reactive-ion etching asset, a deep via model, a sputter equipment, an ion implantation equipment and a substrate pre- and post-metrology system. All of these systems are designed to ensure the highest process repeatability and provide easy setup, operation and maintenance. In addition to the etch process, TELINDY Plus unit also offers several other services, such as sublimation, sputtering, pre- and post-metrology, ion implant, wet chemical etch and non-destructive thermal treatments. It is a highly versatile machine that can be used for a variety of semiconductor applications and processes. TEL / TOKYO ELECTRON TELINDY Plus tool is a reliable, high-yielding dry etcher / asher asset that is built to meet the most demanding environmental and process requirements. Its modular model architecture offers users a wide range of capabilities for semiconductor processing and enables them to tailor the equipment to their specific needs.
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