Used TEL / TOKYO ELECTRON TELINDY Plus #9251690 for sale
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ID: 9251690
Wafer Size: 12"
Vintage: 2010
Vertical LPCVD furnaces, 12"
2010 vintage.
TEL / TOKYO ELECTRON TELINDY Plus is an etcher/asher equipment manufactured by TEL that is used by the semiconductor industry for patterning a variety of microelectronic devices such as wafer processing, MEMS fabrication, and thin-film encapsulation. It is designed to enable precision etching and ashing of substrate materials to produce desired shapes. The system is composed of a controller, an etching process chamber, and a vacuum unit. The controller on TEL TELINDY Plus machine provides the necessary user interfaces for setting up the etching process and initiating the program. The controller features advanced software algorithms that enable automatic adjustment of the etching parameters, giving users greater control and flexibility over the process. The etching process chamber is an all-glass chamber that is used to house the substrate during etching and ashing. The chamber is equipped with specialized gas delivery systems, an etching electrode, and pressure and temperature sensors. It is designed to provide a highly defined etching environment and ensure uniform and consistent etching results. The vacuum tool of TOKYO ELECTRON TELINDY Plus asset is composed of an ion getter pump and a rotary vane pump, providing the necessary vacuum level for substrate processing. The model also features a turbo pump that supports the maintenance of the vacuum level and aides in heat transfer from the etching processes. TELINDY Plus equipment is designed with an optically transparent electrode that is used to create an electric field for precise etching and ashing of wafers. The electrode also guarantees uniform and repeatable etching profiles. The system is compatible with a variety of gases and can be used to implement varying processes from wet etching to dry etching. TEL / TOKYO ELECTRON TELINDY Plus unit is a reliable and efficient etcher/asher machine that is ideal for technicians working in the semiconductor industry. The tool offers an advanced level of automation, precise etching profiling, and a variety of process options that make it an ideal choice for wafer processing.
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