Used TEL / TOKYO ELECTRON TELINDY Plus #9251691 for sale

TEL / TOKYO ELECTRON TELINDY Plus is a multi-functional etcher or asher used in semiconductor production processes. It is a high-performance equipment which is used to etch patterns onto semiconductor wafers and is capable of etching some of the most intricate features. The etcher is equipped with independent precision multi-zone temperature control, with a maximum temperature of 800°C. The temperature control is enabled by a combination of a gas panel and an induction coil. Moreover, the plus has a unique floating susceptor design, used to ensure a uniform etching across the wafer surface. The susceptor is a low temperature susceptor which does not generate any damage to the material. The equipment is reliable and precise, enabling processes such as shallow junction formation, resist strip, damage removal and wafer cleaning. It also offers tight process control, as the system is equipped with a programmable end-point monitoring unit. This machine guarantees precise etching at the definite end-point. Additionally, it has an advanced safety tool called EPM (Etcher/Processor Module), providing safety control of the etch process. The etcher is also user friendly, enabling rapid process setting and simple operation with a touch screen display. This is possible due to the in-built process recipes which are easy to customise and optimise. TEL TELINDY Plus is an advanced etcher/asher asset used in semiconductor production. Its unique temperature control, susceptor design, process control and safety features enable precise and reliable etching processes. Moreover, the user-friendly interface updates technicians with the information they need to ensure effective process operations.