Used TEL / TOKYO ELECTRON TELINDY Plus #9313289 for sale

TEL / TOKYO ELECTRON TELINDY Plus is an advanced chemical etcher / asher made by TEL, designed for semiconductor wafer processing. TEL TELINDY Plus is a chemical vapor etcher / asher that uses non-contact maintenance, which involves exchanging components as a unit without having to stop the etching process. It also features a modular design, enabling a wide variety of process recipes to be used. TOKYO ELECTRON TELINDY Plus is composed of a main body, process chamber, a vacuum pump, and a wafer stage. The main body is where the wafer stage, vacuum pump, and process control panel are located. The wafer stage is a platform where the wafer is placed in order to be etched or washed. The vacuum pump is used to reduce the pressure of the process chamber to create a vacuum environment for etching in order to simultaneously etch multiple wafers at a time. The process control panel is used to control and monitor the process from start to finish, as well as to modify parameters to optimize the etching performance. TELINDY Plus uses chemical vapor deposition (CVD) to deposit a thin dielectric layer on top of the wafer. This layer serves as a mask to determine which patterns or shapes will be etched out of the wafer. The etching process involves exposing the wafer to a chemical etchant in a vacuum chamber, which erodes away the material in the desired area. Once this process is completed, a series of high-purity gas is delivered to the chamber to wash away the etchant and clean the wafer. TEL / TOKYO ELECTRON TELINDY Plus provides users with a tightly controlled environment for maximum repeatability and process control. It has the ability to accurately adjust the temperature, pressure, rotation speed, and gas mixture. This allows users to optimize the process and achieve maximum etching results. It also offers high gas flow accuracy for precise gas delivery and uniformity. TEL TELINDY Plus is well equipped with safety features such as pressure sensors, leakage sensors, temperature sensors with an alarm function, and overpressure shutdown. The intuitive user interface allows users to easily monitor and control the etching process from start to finish. Additionally, TOKYO ELECTRON TELINDY Plus offers a variety of options for customization. Overall, TELINDY Plus is an advanced chemical etcher / asher. It has the capabilities for precise etching and uniform gas delivery, as well as advanced safety features and versatility in customization. It is the perfect solution for semiconductor wafer manufacturing.