Used TEL / TOKYO ELECTRON Telius 305 DRM #9294211 for sale

TEL / TOKYO ELECTRON Telius 305 DRM is an automated dry etcher equipment designed for high-quality, high-performance etching solutions. The etcher is based on the advanced and proven Telius 305 platform, which has been used for many years in various applications. The system utilizes proprietary electron beam heating and hydrogen plasma source technologies to uniformly etch substrates of various materials such as glass, quartz, silicon, alumina and other ceramics. The unit is particularly well-suited for etching and patterning semiconductor devices with high precision and uniformity. Featuring a three-axis stage and a large wafer diameter range from 200mm to 300mm, the etcher can accommodate a large variety of substrates. In addition, the Telius 305 platform can be customized for various processes such as oxide etching, sputtering, plasma etching and deep resist etching. The machine utilizes a delayed reflection mode of operation and a beam blanking pulse to ensure uniform beam intensity and thereby ensure uniform wafer etching. It features state-of-the-art variable tilt etching and variable jittering, as well as variable electrostatic chucking. Additionally, the tool is equipped with advanced temperature control capabilities to ensure accurate etch rates. TEL Telius 305 DRM is designed with process control and data acquisition capabilities to ensure repeatability and accuracy of parameters. The asset can store process recipes and allows users to store multiple recipes for different etching applications, enabling easy process optimization. The model also utilizes a shutterless optical beam shutter to enable better visibility of the process. The equipment is highly compact and requires minimal installation space. Its robust design is coupled with a high-speed digital control system and high-performance digital servomotors, making it reliable and efficient. TOKYO ELECTRON Telius 305 DRM is also designed for easy maintenance and high uptime. It also offers high speed and high throughput capability. Overall, Telius 305 DRM is an advanced, reliable and efficient etcher unit that is suitable for high-precision and uniform etching of various substrates. The etcher's robust design, advanced temperature control capabilities, and process control and data acquisition capabilities make it suitable for a wide range of applications.