Used TEL / TOKYO ELECTRON Telius 305 SCCM #293652091 for sale

TEL / TOKYO ELECTRON Telius 305 SCCM is an advanced etch asher used in integrated circuit fabrication. It is an SCCM (Substrate Charge Control Module) machine allowing precise control over substrate charge. This machine is used in the processing of substrates with up to 300mm diameter and its low part cost per semiconductor device makes it the ideal solution for advanced etch asher applications. The core features of TEL Telius 305 SCCM include its electrostatic charge control with independently adjustable bias on each location, an automated wafer handling equipment, and its ability to process substrates with up to 300mm diameter. This machine is equipped with two plasmas sources, a loadlock chamber, and an extensive computer control system. The loadlock chamber allows for easy wafer exchange without the need for extensive down-time, and the plasma sources enable precise etching of the substrates. In addition, the dual plasma sources are designed to ensure uniform etching of the substrate. The computer control unit allows for precise processes monitoring and adjustment of the etching parameters. TOKYO ELECTRON Telius 305 SCCM is designed for high-performance applications and is a stand-out in the etch asher industry. It boasts a high-speed etching time of 5 minutes, and a throughput rate of up to 450 substrates per hour. This machine is able to process substrates up to 125 μm thick, and is accurate in both wafer flatness and roundness measurement and is capable of pulse etching and ion-beam transfer etching. The options for etching methods are customized according to the type of wafer being processed. Telius 305 SCCM includes multiple safety features such as emergency stop button, two-level safety interlocks, and a safety switch. Furthermore, it has an advanced warning machine which is designed to detect any irregularities or damages during the substrate processing and alert the operator. TEL / TOKYO ELECTRON Telius 305 SCCM is an efficient and reliable etch asher which offers premium performance for integrated circuit fabrication. It is cost-effective for all fabrication processes, and its sophisticated technology ensures precision etching of most substrates.