Used TEL / TOKYO ELECTRON Telius 305 SCCM #293822433 for sale

TEL / TOKYO ELECTRON Telius 305 SCCM is a fully automatic etcher (or asher) designed for high volume production process. It is a single wafer production equipment that is capable of processing up to 12 wafers per run, allowing for efficient and flexible production. It is a dry etching system and uses stand-off plasma source technology to deposit and etch materials with a high degree of accuracy and precision. TEL Telius 305 SCCM is built on a robust two-axis stage table that is capable of carrying wafers up to 12" in size. Its self-contained integrated conveyor unit also ensures reliable transport of the wafers, with a wide range of adjusted speed settings available. A high-precision Z axis piezo actuator is used to provide ideal and consistent wafer positioning during the etching process. The machine is equipped with advanced closed-loop process control technology, which allows for automated and precise control of processing parameters to guarantee the most accurate etching results every time. The machine has the ability to store up to 10 recipes for repeatable process sequences, and is capable of etching different materials including silicon, aluminum, copper, and many other metals and alloys. The etcher is provided with a fully automated cleanliness and safety module including a dual gas delivery tool for inert gas protection during transfer, as well as a nitrogen purging asset to ensure clean and particle-free etching results every time. It is a highly versatile etching model suitable for a variety of production lines and applications. TOKYO ELECTRON Telius 305 SCCM is an efficient and reliable etching solution designed to meet basic production needs and requirements, providing a perfect combination of flexibility and process control technology for a variety of processes and materials. It is a highly economical and versatile machine that is ideal for high-volume etching and other production applications.